| Area of application: |
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast . |
| Description: |
Pressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller. |
| Nominal inside diameters (ID): |
100 (4" ) - 400 (16") |
| Body material: |
Aluminium hard anodized; Aluminum |
| Actuator types: |
Stepper motor, integrated controller |
| Feedthrough: |
Rotary feedthrough (actuator), Shaft feedthrough (sealing ring) |
| Sealing technology: |
SEALRING-System |
| Sealing materials: |
Bonnet: FKM (VITON®) / Gate: FKM (VITON®) |
| Cycles until first service: |
1 million throttling cycles, 200'000 closing cycles (unheated and under claen conditions) |
| Leak rate: |
Body: < 1 . 10-9 mbar ls-1
Valve seat: < 1 . 10-9 mbar ls-1 |
| Pressure control |
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The controller ensures fast and accurate pressure control. By operating the LEAEN function - needs to be done only once at start-up - the system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum pressure control.
With its adaptive algorithm the controller contiuously adjusts to the current process conditions (gas type, gas flow). This assures always an optimal pressure control performance. |
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| Position control |
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In position control mode the valve plate can be moved to any position. |
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| Display |
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Status and position are displayed by means of 4 bright digits. |
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| Remote operation |
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The valve can be controlled by a host computer via RS232, Logic or DeviceNet® interface. The RS 232 interface also has digital inputs to close and open the valve. Control via Logic interface performs via digital and analog inputs and outputs.
The RS232 interface has digital inputs to close and open the valve in addtion.
The Logic interface allows to control the valve via digital and analog inputs and outputs. |
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| Service Port |
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The valve has a service port (RS232) to connect a computer. A software allows for easy setup, operation, monitoring, data recording, data analysis and diagnostics.
The valve has a service port (RS232) for connecting a computer. VAT can provide the following two versions of software: Basic version 'VAT Control View': Available as freeware (see www.vatvalve.com). Independent of the host computer, it enables setup, operation, monitoring and diagnosis. Extended version 'VAT Control Performance Analyzer' is available on order. This sophisticated tool offers a much wider range of possibilities than the basic version. For instance, it is possible to grahpically display the pressure behaviour or to program and record sequences. Also several possibilities for data analysis and process optimization are availablw. For connecting the valve both versions require a special cable from VAT. |
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| Power Failure Option (PFO) |
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This function closes the valve automatically in case of a power failure. |
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| Sensor Power Supply (SPS) |
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Optionally the valve may be equipped with a ±15 VDC supply module for the sensor(s). |
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| RS232 interface |
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Serial RS232-Interface:
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Control of all functions,
selectable baud rate (600 - 115200) |
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Digital inputs:
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Close valve and open valve |
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Digital outputs:
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Valve closed and valve open |
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Analog outputs:
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Actual pressure and actual valve positon (optional) |
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| Logic interface |
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Digital inputs:
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Close valve and open valve |
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Inhibit operation via service port |
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Digital outputs:
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Valve closed and valve open |
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Analog inputs:
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Pressure- or position setpoint |
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Analog outputs:
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Actual pressure and actual valve positon |
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| DeviceNet® interface |
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Control of all functions. DeviceNet® group 2 slave with Polling, Bit Strobe and Change of State/Cyclic Transmission. UCMM port (unconnected message manager) is available. 'Offline Connection Set' according to DeviceNet® specification release 2.0 is implemented. |
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| Technical Data |
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Power input:
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24 VDC, 60 W max. |
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Control accuracy:
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0.1% of sensor full scale |
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Step resolution:
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DN160 - DN250: 12'444 postions (full stroke) |
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DN320 - DN400: 13'440 postions (full stroke) |
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Sensor input:
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0-10 VDC linear to pressure |
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differential, Ri > 100kOhm |
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Sensor supply:
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+ 24 VDC, +/- 15VDC |
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Power Failure Option:
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Battery type: Ultracap
Charging time: 2 min |
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Durability (25°C) up to 10 years |
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Input (Interface):
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Digital: control with relay, opto coupler or
voltage source (5-24 VDC) |
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Analog: 0 - 10 VDC, Ri > 100kOhm |
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Output (Interface):
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Digital: potential free relay contacts,
70V max., 500 mA max., 10 W max. |
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Analog: 0 - 10 VDC, 1 mA max. |
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